Vacuum Components

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• Target Length：300~2000 mm
• Back tube diameter：OD 133 mm
• Back tube thickness：4 mm
• Target Thickness：6~12 mm
• Target utilization：Ceramic target >70% ；Metal target >80% 
• Uniformity：±5% 
• Target rotation speed：3~15rpm
• Reliability operation test：5 million times~10 million times

• Target Length：300~3000 mm
• Back tube diameter：OD 170 mm
• Back tube thickness：9 mm
• Target Thickness：6~12 mm
• Target utilization：Ceramic target >70% ；Metal target >80% 
• Uniformity：±5% 
• Target rotation speed：3~15rpm
• Reliability operation test：5 million times~10 million times

• Rated power：≦ DC100 KW
• Voltage/Current：≦ 1000V/225A
• Target Length ≦ 2000mm
• Leak rate：<1*10-9 bar*l/s
• Target utilization：≦ 40%
• Uniformity：±3% 

• Rated power：≦ AC 80 KHz
• Voltage/Current：≦ 1000 V/225A
• Target Length ≦ 2000 mm
• Leak rate：< 1*10-9 bar*l/s
• Target utilization：≦ 30%
• Uniformity：±3% 

• Rated power：≦ DC 100 KW
• Voltage/Current：≦ 1000 V/225 A
• Target Length ≦ 2000 mm
• Leak rate：<1*10-8 bar*l/s
• Target utilization：≦ 40%
• Uniformity：±3% 

• Leak rate：<1.2*10-9 bar*l/s
• Operating temperature：< 200 degrees C
• Gases process： Ar、O2、Ar+O2
• Maximum operating pressure ：~2 mtorr
• Nominal Gas Flow：20– 200 sccm
• Uniform magnetic field design

• Infrared heating temperature up to 1200 degrees C
• Temperature control accuracy within 5 degrees C

• Multi-disc independent control to ensure uniform temperature in the whole area
• Infrared heating temperature up to 800 degrees C
• Immediate feedback PID control accuracy ± 1.5 degrees C

• Opening size: customized
• Actuation time: within 2 seconds
• Body material: 304 stainless steel
• Valve plate: 6061-T6 aluminum
• Leakage rate: <1*10-9 bar*l/s
• Cap/gate/shaft seal: Viton

• Opening size: customized
• Actuation time: within 2 seconds
• Body material: 304 stainless steel
• Valve plate: 6061-T6 aluminum
• Leakage rate: <1*10-9 bar*l/s
• Cap/gate/shaft seal: Viton

•  Opening size: customized
• Actuation time: within 2 seconds
• Body material: 304 stainless steel
• Valve plate: 6061-T6 aluminum
• Leakage rate: <1*10-9 bar*l/s
• Cap/gate/shaft seal: Viton。

• The pick-and-place mechanism does not need to use shrapnel to clamp.
• No need to make a dedicated sub carrier
• A variety of carrier size designs allow the coating of 27"~44" substrates.
• CRS is equipped with multi-axis ROBOT, and the loading and unloading is fast and stable.
• Nozzle suction piece is non-contact type

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