Solar Cell, PECVD, PVD, LPCVD: Evaporation and Sputtering
Solar Cell, PECVD, PVD, LPCVD: Evaporation and Sputtering
Solar Cell, PECVD, PVD, LPCVD: Evaporation and Sputtering
- Perovskite high-efficiency battery coating process(In-line PVD and RPD)
- Mono-cell HIT PECVD + ITO PVD process and equipment technology(cluster PECVD and in-line double-sided coating design)
- High-efficiency PECVD process and equipment technology
- Front electrode (i-ZnO/BZO、AZO) of thin-film solar cell process and equipment technology (LPCVD and PVD equipment)
- Rear electrode (AZO、AL、Ag、NiCr…) of thin-film solar cell process and equipment technology (depending on single-junction or dual-junction process)
- CIGS thin-film solar cell PVD process and equipment technology(Mo, CuGa and In… PVD equipment)