Vacuum PVD Coating Equipment

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• IBS PVD Series
• Use a high-energy ion source (Ion Beam) to bombard to form a thin film
• Can be used with surface modification, cleaning and compact ion source modules
• With optical real-time monitoring (Real Time Monitor) feedback to accurately correct the film
• Effective coating area: 90mm in diameter
• Placement size and number of substrates: diameter <90mm ×7 pcs
• Macleod Simulation

  Application： 

1. 5G optical communication industry
2. 3D Sensing- IR Cut/filter blue light
3. 3D infrared narrow band pass filter
4. 3D face recognition infrared filter

• Cluster PVD Series
• GaAs,  GaN, SiC components EMI coating 
• Metal / ITO, AZO, metal oxide, non-metal oxide coating
• Can be used with surface modification, cleaning and compact ion source modules
• Working temperature: room temperature~450°C

 Application：

1. Applied in the glass and flexible substrates for key equipment and process industries, such as 5G optical communications, semiconductors, display panel, touch panel, optical coating touch panel, OGS, etc
2. For mobile phones, tablets, laptops, and even large-scale TVs

•  BSVL PVD Series 
• Semiconductor Metal electrode, MEMS coating SiO2, SiNx, Metal and metal oxide
• ITO / Metal / SiO2 + ITO Film coating
• Anti-Reflection: 2AR / 4AR / 6AR

 Application：  

1. Applied in the glass and flexible substrates for key equipment and process industries, such as 5G optical communications, semiconductors, display panel, touch panel, optical coating touch panel, OGS, etc
2. Mobile phones, tablets, laptops, large-size TV applications

•  R2R PVD Series 
• ITO / Metal / SiO2 + ITO Film coating
• Index Matching + ITO Film
• Key modules of professional vacuum coating technology
• Online real-time optical monitoring and calibration module with independent technology
• Low temperature process technology

 Application：

1. Medical antibacterial nanosilver industry, flexible battery industry and flexible circuit board industry
2. Energy-saving film, anti-reflection film, high-reflection film, anti-reflection protective film
3. Flexible batteries, flexible solar energy (CIGS/OLED), displays

•  ASH PVD Series 
• CIGS / Metal / AZO / AL Film coating
• Index Matching + ITO Film

Application：

1. Applied in glass and plastic substrate for key equipment and process industries, such as solar, EMI, decorative coating, etc
2. For mobile phones, tablets, laptops, and even large-scale TVs

•  ASV PVD Series 
• ITO / Metal / SiO2 + ITO Film coating 
• Index Matching + ITO Film
•  Anti-Reflection- 2AR / 4AR / 6AR / 12AR 
• Coating on one side or both sides at the same time

 Application：

1. Applied in the glass and flexible substrates for key equipment and process industries, such as display panel, touch panel, optical coating touch panel, OGS, etc
2. For mobile phones, tablets, laptops, and even large-scale TVs

•  AST PVD Series 
• ITO / Metal / SiO2 + ITO Film coating
• Index Matching + ITO Film
• Anti-Reflection: 2AR / 4AR / 6AR / 12AR

Application：

1. Applied to the glass and flexible substrates for key equipment and process industries, such as display panel, touch panel, optical coating touch panel, OGS, etc
2. For mobile phones, tablets, laptops, and even large-scale TVs

•  ASVRU PVD Series 
• ITO / Metal / SiO2 + ITO Film coating 
• Index Matching + ITO Film
• Anti-Reflection: 2AR / 4AR / 6AR / 12AR

Application：

1. Applied to the glass and flexible substrates for key equipment and process industries, such as display panel, touch panel, optical coating touch panel, OGS, etc
2. For mobile phones, tablets, laptops, and even large-scale TVs

• Cluster CVD Series 
• Working temperature：room temperature to 350°C
• The power supply can be matched with MF, RF, DC and Micro Wave
• SiOx, Al2O3, SiNx, a-Si... and other films
• Can be used with surface modification, cleaning and compact ion source modules
• Uniform deposition of different shapes and good coverage
• High coating rate
• With plasma spectrum analyzer for process plasma monitoring and control

 Application：

1. 5G optical communications, semiconductors, TFT and solar cell absorber layers and other industries
2. Scratch-resistant display screen
3. Encapsulation layer, insulation layer
4. Wear-resistant film of the product

•  ASH CVD Series  
• Working temperature：room temperature to 300°C
• Plating rate of thermal cracking reaction is fast
• SiOx, Al2O3, SiNx, a-Si, TCO... and other thin films
• Strong step coverage and high purity deposition
• Handling large size substrates

 Application：

• Semiconductor, TFT and solar cell electrode layer industries
• OLED panel Mask Frame protective layer

• 2D barcode reading
• Quickly search for the location of feature points
• CCD automatically searches for characteristic points, and corrects and locates the XY axis and theta angle of the test chuck
• Positioning accuracy ±0.02mm

• Using high-precision JAPAN UNIX welding module
• Install double welding module and double mover, can install different welding heads, carry out different types of welding, division of labor, increase production capacity
• Quickly search for the location of feature points
• CCD automatically searches for characteristic points, and corrects and locates the XY axis and θ angle of the welding head
• Positioning accuracy ±0.02mm
• CCD appearance inspection after welding
• Laser height search and scan
• Telecommunications inspection after welding